International Conference on Advanced Plasma for Semiconductors
It is our great pleasure to welcome you to the 2026 International Conference on Advanced Plasma for Semiconductors – Simulation & AI and Plasma Processing for Semiconductor Manufacturing (ICAPS 2026), which will be held on July 8–9, 2026, at Feng Chia University in Taichung, Taiwan.
ICAPS 2026 is jointly organized by Feng Chia University (FCU) and Fraunhofer Institute for Surface Engineering and Thin Films (Fraunhofer IST), Germany. This conference aims to bring together leading scientists, engineers, and industry experts from around the world to exchange knowledge and insights on cutting-edge plasma technologies for semiconductor manufacturing.wan
